The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2013
Filed:
Feb. 08, 2011
Huirong Yao, Plainsboro, NJ (US);
Zachary Bogusz, Belmar, NJ (US);
Guanyang Lin, Whitehouse Station, NJ (US);
Mark Neisser, Whitehouse Station, NJ (US);
Huirong Yao, Plainsboro, NJ (US);
Zachary Bogusz, Belmar, NJ (US);
Guanyang Lin, Whitehouse Station, NJ (US);
Mark Neisser, Whitehouse Station, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
The invention relates to an underlayer coating composition comprising a polymer, where the polymer comprises at least one hydroxyaromatic unit in the backbone of the polymer phenol which has a pendant group comprising a fluoro or iodo moiety, and at least one unit comprising an aminoplast. The invention further relates to a process for forming an image using the composition, especially for EUV.