The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 11, 2013

Filed:

Mar. 09, 2010
Applicants:

Charles Mark Phillips, Sicklerville, NJ (US);

Barbara Marshik-geurts, Methuen, MA (US);

Leonard I. Kamlet, Andover, MA (US);

Martin L. Spartz, Ellington, CT (US);

Vidi Saptari, Cambridge, MA (US);

Inventors:

Charles Mark Phillips, Sicklerville, NJ (US);

Barbara Marshik-Geurts, Methuen, MA (US);

Leonard I. Kamlet, Andover, MA (US);

Martin L. Spartz, Ellington, CT (US);

Vidi Saptari, Cambridge, MA (US);

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01J 3/45 (2006.01); G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for monitoring of siloxane compounds in a biogas includes the step of generating a first absorption spectrum based on a ratio of a first spectral measurement and a second spectral measurement. The first spectral measurement is from a non-absorptive gas having substantially no infrared absorptions in a specified wavelength range of interest and the second spectral measurement is from a sample gas comprising the biogas. The method also includes the step of calculating a concentration of at least one siloxane compound in the biogas using a second absorption spectrum based on, at least, a first individual absorption spectrum for a known concentration of the at least one siloxane compound.


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