The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Aug. 01, 2008
Marcel Beckers, Eindhoven, NL;
Marcus Adrianus Van DE Kerkhof, Helmond, NL;
Siebe Landheer, Eindhoven, NL;
Wouterus Johannes Petrus Maria Maas, Boxtel, NL;
Jeroen Peter Johannes Bruijstens, Eindhoven, NL;
Ivo Adam Johannes Thomas, Son, NL;
Franciscus Johannes Joseph Janssen, Eindhoven, NL;
Bartholomeus Mathias Van Oerle, Nijmegen, NL;
Marcel Beckers, Eindhoven, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Siebe Landheer, Eindhoven, NL;
Wouterus Johannes Petrus Maria Maas, Boxtel, NL;
Jeroen Peter Johannes Bruijstens, Eindhoven, NL;
Ivo Adam Johannes Thomas, Son, NL;
Franciscus Johannes Joseph Janssen, Eindhoven, NL;
Bartholomeus Mathias Van Oerle, Nijmegen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus includes a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The apparatus also includes a barrier member, surrounding a space between the projection system and, in use, the substrate, to define in part with the projection system a reservoir for liquid. A radially outer surface of the barrier member facing a portion of projection system and a radially outer surface of the portion of the projection system facing the barrier member each have a liquidphobic outer surface. The liquidphobic outer surface of the barrier member and/or the liquidphobic outer surface of the portion of the projection system has an inner edge that defines in part the reservoir.