The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Dec. 16, 2009
Hiroshi Matsutani, Hitachi, JP;
Takumi Ueno, Hitachi, JP;
Alexandre Nicolas, Hitachi, JP;
Yukihiko Yamashita, Tsukuba, JP;
Ken Nanaumi, Chikusei, JP;
Akitoshi Tanimoto, Hitachi, JP;
Hiroshi Matsutani, Hitachi, JP;
Takumi Ueno, Hitachi, JP;
Alexandre Nicolas, Hitachi, JP;
Yukihiko Yamashita, Tsukuba, JP;
Ken Nanaumi, Chikusei, JP;
Akitoshi Tanimoto, Hitachi, JP;
Hitachi Chemical Company, Ltd., Tokyo, JP;
Abstract
The positive tone photosensitive composition of the invention comprises an alkali-soluble resin having a phenolic hydroxyl group, a compound producing an acid by light, a thermal crosslinking agent and an acrylic resin. It is possible to provide a positive tone photosensitive composition that can be developed with an aqueous alkali solution, has sufficiently high sensitivity and resolution, and can form a resist pattern with excellent adhesiveness and thermal shock resistance.