The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 11, 2013

Filed:

Jun. 05, 2012
Applicants:

Philip L. Hower, Concord, MA (US);

Barry Jon Male, West Granby, CT (US);

Wilburn M. Miller, Manchester, NH (US);

Inventors:

Philip L. Hower, Concord, MA (US);

Barry Jon Male, West Granby, CT (US);

Wilburn M. Miller, Manchester, NH (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/36 (2006.01); H01L 23/58 (2006.01); H01L 23/34 (2006.01);
U.S. Cl.
CPC ...
H01L 23/345 (2013.01);
Abstract

An integrated circuit (IC) includes a heated portion. The heated portion/IC includes a substrate having a topside semiconductor surface having circuitry configured to provide a circuit function. A pre-metal dielectric (PMD) layer is on the topside semiconductor surface. A metal interconnect stack is on the PMD. A trim portion includes one or more temperature sensitive circuit components which affect a temperature behavior of the IC. The heated portion extends over and beyond an area of the trim portion having an integrated heating structure including at least a first heater formed from a metal interconnect level that includes a first plurality of winding segments which have a varying pitch. A heat spreader formed from a second metal interconnect layer is between trim portion and the first heater. Thermal plugs are lateral to the temperature sensitive circuit components and thermally couple the heat spreader to the topside semiconductor surface.


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