The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Jun. 13, 2008
Richard Comunale, Ipswich, MA (US);
Alexander Groholski, Salem, MA (US);
John A. Notte, Iv, Gloucester, MA (US);
Randall Percival, Raymond, NH (US);
Billy W. Ward, Boyce, LA (US);
Richard Comunale, Ipswich, MA (US);
Alexander Groholski, Salem, MA (US);
John A. Notte, IV, Gloucester, MA (US);
Randall Percival, Raymond, NH (US);
Billy W. Ward, Boyce, LA (US);
Carl Zeiss Microscopy, LLC, Thornwood, NY (US);
Abstract
Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).