The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Apr. 27, 2010
Dan Nicolaescu, Kyoto, JP;
Shigeki Sakai, Kyoto, JP;
Junzo Ishikawa, Kyoto, JP;
Yasuhito Gotoh, Otsu, JP;
Dan Nicolaescu, Kyoto, JP;
Shigeki Sakai, Kyoto, JP;
Junzo Ishikawa, Kyoto, JP;
Yasuhito Gotoh, Otsu, JP;
Nissin ION Equipment Co., Ltd., Kyoto-shi, JP;
Kyoto University, Kyoto-shi, JP;
Abstract
To improve an efficiency of utilizing electrons and efficiently suppress an ion beam spread by a space charge effect while eliminating a need for a special magnetic pole structure by effectively using a space in the vicinity of a magnet, there are provided an ion source, a collimating magnet and a plurality of electron sources, wherein the electron sources are arranged in a magnetic field gradient region formed on an ion beam upstream side or ion beam downstream side of the collimating magnet and arranged outside a region passed by the ion beam, and an irradiation direction of the electrons is directed to supply the electrons to the magnetic field gradient region.