The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Jan. 11, 2011
Applicants:
Yoshitaka Hamada, Joetsu, JP;
Kazuhiro Hirahara, Joetsu, JP;
Inventors:
Yoshitaka Hamada, Joetsu, JP;
Kazuhiro Hirahara, Joetsu, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Provided is a preparation process of trisilylamine capable of preparing high-purity trisilylamine more easily at a lower cost. More specifically, provided is a preparation process of trisilylamine, comprising a step of thermally decomposing perhydropolysilazane under an oxygen-free or low oxygen atmosphere.
Hamada, Yoshitaka. (2013). Preparation process of trisilylamine (U.S. Patent No. 8461367). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8461367
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile