The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Apr. 09, 2010
Yu-lien Huang, Jhubei, TW;
Han-pin Chung, Fongshan, TW;
Shiang-bau Wang, Pingzchen, TW;
Abstract
A method for forming an STI structure is provided. In one embodiment, a trench is formed in a substrate, the trench having a first sidewall and a second sidewall opposite the first sidewall, the sidewalls extending down to a bottom portion of the trench. An insulating material is deposited to line the surfaces of the sidewalls and the bottom portion. The insulating material proximate the top portions and the bottom portion of the trench are thereafter etched back. The insulating material is deposited to line the inside surfaces of the trench at a rate sufficient to allow a first protruding insulating material deposited on the first sidewall and a second protruding insulating material deposited on the second sidewall to approach theretogether. The steps of etching back and depositing are repeated to have the first and second protruding materials abut, thereby forming a void near the bottom of the trench.