The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Jun. 29, 2009
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using same
Kenichiro Sato, Haibara-gun, JP;
Akinori Shibuya, Haibara-gun, JP;
Shuhei Yamaguchi, Haibara-gun, JP;
Hiroshi Inada, Haibara-gun, JP;
Kenichiro Sato, Haibara-gun, JP;
Akinori Shibuya, Haibara-gun, JP;
Shuhei Yamaguchi, Haibara-gun, JP;
Hiroshi Inada, Haibara-gun, JP;
FUFIFILM Corporation, Tokyo, JP;
Abstract
An actinic ray-sensitive or radiation-sensitive resin composition includes (A) a resin having at least two of repeating units represented by general formula (1) below and exhibiting increased solubility in an alkali developer when acted on by an acid, and (B) a compound that generates an acid when exposed to actinic rays or radiation. In the formula, each of R, A, R, Z, L and n represents the same as defined in the claims and in the specification.