The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Sep. 15, 2009
Leonard Rosenbaum, Greenport, NY (US);
Karlheinz Strobl, Mount Sinai, NY (US);
Paul J. Decker, Ridge, NY (US);
Leonard Rosenbaum, Greenport, NY (US);
Karlheinz Strobl, Mount Sinai, NY (US);
Paul J. Decker, Ridge, NY (US);
CVD Equipment Corporation, Ronkonkoma, NY (US);
Abstract
The use of deposition modules groups for each CVD deposition position including at least two deposition modules, together with a Motion Control System that controls and confines the motion of said deposition modules, enables a quick deposition module exchange at the deposition locations of On-Line or Off-Line CVD coating system. This results in a high volume large area CVD coating system that can increase the commercial viability of a given CVD system design through production throughput increases, production cost reductions, overall higher process flexibility and/or improved film quality.