The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2013
Filed:
Sep. 02, 2010
Christopher J. Evans, Concord, NC (US);
John Filhaber, East Haddam, CT (US);
Vivek G. Badami, Higganum, CT (US);
Jan Liesener, Middletown, CT (US);
Christopher J. Evans, Concord, NC (US);
John Filhaber, East Haddam, CT (US);
Vivek G. Badami, Higganum, CT (US);
Jan Liesener, Middletown, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
Deformations of a surface of a test object can be measured by attaching mirrors to a surface of a test object, each mirror having a reflective surface with a dimension and a radius of curvature smaller than those of the surface of the test object. Light is directed towards the mirrors and a reference surface, and interference patterns are generated using light reflected from the mirrors and the reference surface. Changes in the surface of the test object are determined based on the interference patterns.