The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2013
Filed:
May. 11, 2011
Jeffrey F. Denatale, Thousand Oaks, CA (US);
Philip A. Stupar, Oxnard, CA (US);
Yu-hua Lin, Oak Park, CA (US);
Robert L. Borwick, Thousand Oaks, CA (US);
Alexandros P. Papavasiliou, Thousand Oaks, CA (US);
Jeffrey F. DeNatale, Thousand Oaks, CA (US);
Philip A. Stupar, Oxnard, CA (US);
Yu-Hua Lin, Oak Park, CA (US);
Robert L. Borwick, Thousand Oaks, CA (US);
Alexandros P. Papavasiliou, Thousand Oaks, CA (US);
Teledyne Scientific & Imaging, LLC., Thousand Oaks, CA (US);
Abstract
A microscale apparatus includes a microscale rigidized Parylene strap having a reinforcement structure extending from a first side of the strap, a first silicon substrate suspended by the microscale rigidized Parylene strap, the microscale rigidized Parylene strap conformally coupled to the first substrate, and a second substrate conformally coupled to the microscale rigidized Parylene strap to suspend the first silicon substrate through the microscale rigidized Parylene strap.