The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2013
Filed:
Nov. 11, 2009
Takashi Ichimura, Hitachinaka, JP;
Takeshi Ogashiwa, Hitachinaka, JP;
Yasuko Aoki, Hitachi, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The present invention provides a charged particle beam device in which signal electrons () are generated from a sample when the sample () is irradiated with a primary charged particle beam (), and then enter different positions of a position-sensitive signal detector () in accordance with energy of the signal electrons (), whereby an energy distribution image of the signal electrons generated from the sample is acquired. Accordingly, it becomes possible to discriminate and select signal electrons having arbitrary energy to thereby obtain an image to which information specific to the arbitrary energy is reflected, and to acquire various characteristic information of the sample.