The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2013
Filed:
Oct. 15, 2012
Applicant:
Touch Micro-system Technology Corp., Taoyuan, TW;
Inventors:
Hung Yi Lin, Taoyuan, TW;
Ming Fa Chen, Taoyuan, TW;
Assignee:
Touch Micro-System Technology Corp., Taoyuan County, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01F 7/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of making a planar coil is disclosed in the present invention. First, a substrate having a trench is provided. Then, a barrier and a seed layer are formed on the substrate in sequence. An isolative layer is used for guiding a conductive material to flow into a lower portion of the trench such that accumulation of the conductive material at opening of the trench is prevented before the lower portion of the trench is completely filled up, thereby avoiding gap formation in the trench.