The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2013
Filed:
Feb. 08, 2012
Marcel François Heertjes, Best, NL;
Wilhelmus Franciscus Johannes Simons, Beesel, NL;
Dennis Andreas Petrus Hubertina Houben, Rothem, NL;
Jeffrey Hendrikus Peter Maria Goossens, Stein, NL;
Marcel François Heertjes, Best, NL;
Wilhelmus Franciscus Johannes Simons, Beesel, NL;
Dennis Andreas Petrus Hubertina Houben, Rothem, NL;
Jeffrey Hendrikus Peter Maria Goossens, Stein, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.