The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2013
Filed:
Nov. 08, 2011
Applicants:
Tomohiro Okumura, Osaka, JP;
Mitsuo Saitoh, Osaka, JP;
Ichiro Nakayama, Osaka, JP;
Taro Kitaoka, Kyoto, JP;
Inventors:
Tomohiro Okumura, Osaka, JP;
Mitsuo Saitoh, Osaka, JP;
Ichiro Nakayama, Osaka, JP;
Taro Kitaoka, Kyoto, JP;
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01); H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a plasma torch unit, a conductor rod having a spiral shape is disposed inside a quartz pipe having a surface coated with boron glass, and a brass block is disposed on the periphery thereof. While a gas is being supplied into a cylindrical chamber, a high-frequency power is supplied to the conductor rod and a plasma is generated in the cylindrical chamber, so that a base material is irradiated with the plasma.