The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2013
Filed:
Sep. 26, 2008
Daisuke Omori, Ibaraki, JP;
Hirohiko Murakami, Ibaraki, JP;
Hiroyuki Yamakawa, Kanagawa, JP;
Satoaki Ikeuchi, Kanagawa, JP;
Daisuke Omori, Ibaraki, JP;
Hirohiko Murakami, Ibaraki, JP;
Hiroyuki Yamakawa, Kanagawa, JP;
Satoaki Ikeuchi, Kanagawa, JP;
Ulvac, Inc., Chigasaki-shi, JP;
Abstract
An object of the present invention is to provide an apparatus and a method by which quantities of water vapor passing through a measured object can be measured with high sensitivity and in a short time period. The apparatus and method measure water vapor permeability of the measured object based on a dew point temperature in a second space measured after introducing water vapor into a first space, wherein the first space and the second space are parted from each other by the measured object, and wherein the first space is maintained at a predetermined temperature and a predetermined humidity under atmospheric pressure, and the second space is maintained in a dry state with a dew point temperature of −70° C. or less under atmospheric pressure.