The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2013
Filed:
Mar. 13, 2012
Norihito Kawaguchi, Tokyo, JP;
Ryusuke Kawakami, Tokyo, JP;
Kenichiro Nishida, Tokyo, JP;
Miyuki Masaki, Tokyo, JP;
Masaru Morita, Tokyo, JP;
Norihito Kawaguchi, Tokyo, JP;
Ryusuke Kawakami, Tokyo, JP;
Kenichiro Nishida, Tokyo, JP;
Miyuki Masaki, Tokyo, JP;
Masaru Morita, Tokyo, JP;
IHI Corporation, Tokyo, JP;
Abstract
In the case of a lens array type homogenizer optical system, the incident angle and intensity of a laser beamentering a large-sized lens (long-axis condenser lens) of a long-axis condensing optical system, which is provided on the rear side, are changed for every shot by performing laser irradiation while long-axis lens arraysandare reciprocated in a direction corresponding to a long axial direction of a linear beam (X-direction). Therefore, vertical stripes are significantly reduced. Further, the incident angle and intensity of a laser beamentering a large-sized lens (projection lens) of a short-axis condensing optical system, which is provided on the rear side, are changed for every shot by performing laser irradiation while short-axis lens arraysandare reciprocated in a direction corresponding to a short axial direction of a linear beam (Y-direction). Therefore, horizontal stripes are significantly reduced.