The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2013
Filed:
Mar. 24, 2011
Applicants:
Kenji Shibata, Tokyo, JP;
Kazufumi Suenaga, Tokyo, JP;
Kazutoshi Watanabe, Tokyo, JP;
Akira Nomoto, Tokyo, JP;
Fumimasa Horikiri, Tokyo, JP;
Inventors:
Kenji Shibata, Tokyo, JP;
Kazufumi Suenaga, Tokyo, JP;
Kazutoshi Watanabe, Tokyo, JP;
Akira Nomoto, Tokyo, JP;
Fumimasa Horikiri, Tokyo, JP;
Assignee:
Hitachi Cable Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided a piezoelectric thin film element, comprising: a substrate; and a piezoelectric thin filmhaving an alkali niobium oxide-based perovskite structure represented by a composition formula (KNa)NbOprovided on the substrate, wherein a carbon concentration of the piezoelectric thin filmis 2×10/cmor less, or a hydrogen concentration of the piezoelectric thin filmis 4×10/cmor less.