The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 21, 2013

Filed:

May. 12, 2009
Applicants:

Hiroto Uchida, Chigasaki, JP;

Yuko Taguchi, Chigasaki, JP;

Masashi Ueda, Chigasaki, JP;

Michihiro Takayama, Chigasaki, JP;

Inventors:

Hiroto Uchida, Chigasaki, JP;

Yuko Taguchi, Chigasaki, JP;

Masashi Ueda, Chigasaki, JP;

Michihiro Takayama, Chigasaki, JP;

Assignee:

Ulvac, Inc., Chigasaki-shi, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention relates to a thin-film solar battery module manufacturing method and a thin-film solar battery module that are capable of securing dielectric breakdown voltage characteristics of high reliability. An important aspect of the invention relates to forming isolation trenches along peripheral regions of a transparent substrate and thereafter selectively removing electrode and semi-conductor layers to arrive at the thin film solar battery module.


Find Patent Forward Citations

Loading…