The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2013
Filed:
Jan. 30, 2007
Mark A. Fodor, Redwood City, CA (US);
Sophia M. Velastegui, Cupertino, CA (US);
Bok Hoen Kim, San Jose, CA (US);
Dale R. Dubois, Los Gatos, CA (US);
Mark A. Fodor, Redwood City, CA (US);
Sophia M. Velastegui, Cupertino, CA (US);
Bok Hoen Kim, San Jose, CA (US);
Dale R. DuBois, Los Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A heater liner assembly suitable for covering the interior of a plasma processing chamber is provided. In some embodiments, a liner assembly for a processing chamber can include a heating element embedded in a body. A flange extending outward from an outer diameter of the body includes an upper surface having a sealing surface and at least one pad that extends from the upper surface of the flange to an elevation beyond the sealing surface. The pad contributes to control of the temperature of the liner assembly by maintaining the liner assembly spaced apart from the processing chamber.