The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2013
Filed:
Jan. 12, 2012
Timothy W. Kemerer, Essex Junction, VT (US);
James S. Nakos, Essex Junction, VT (US);
Steven M. Shank, Essex Junction, VT (US);
Timothy W. Kemerer, Essex Junction, VT (US);
James S. Nakos, Essex Junction, VT (US);
Steven M. Shank, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Trench capacitors and methods of manufacturing the trench capacitors are provided. The trench capacitors are very dense series capacitor structures with independent electrode contacts. In the method, a series of capacitors are formed by forming a plurality of insulator layers and a plurality of electrodes in a trench structure, where each electrode is formed in an alternating manner with each insulator layer. The method further includes planarizing the electrodes to form contact regions for a plurality of capacitors.