The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Apr. 04, 2007
David Chen, San Jose, CA (US);
Haruhiro Harry Goto, Saratoga, CA (US);
Martina Martina, Santa Clara, CA (US);
Frank Greer, San Francisco, CA (US);
Shamsuddin Alokozai, Fremont, CA (US);
David Chen, San Jose, CA (US);
Haruhiro Harry Goto, Saratoga, CA (US);
Martina Martina, Santa Clara, CA (US);
Frank Greer, San Francisco, CA (US);
Shamsuddin Alokozai, Fremont, CA (US);
Novellus Systems, Inc., Fremont, CA (US);
Abstract
Methods are provided for cleaning metal regions overlying semiconductor substrates. A method for removing material from a metal region comprises heating the metal region, forming a plasma from a gas comprising hydrogen and carbon dioxide, and exposing the metal region to the plasma.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile