The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Jun. 06, 2011
Applicants:
Anatoly Romanovsky, Palo Alto, CA (US);
George Kren, Los Alto Hills, CA (US);
Bret Whiteside, Gilroy, CA (US);
Inventors:
Anatoly Romanovsky, Palo Alto, CA (US);
George Kren, Los Alto Hills, CA (US);
Bret Whiteside, Gilroy, CA (US);
Assignee:
KLA-Technor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/13 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed herein is a method and apparatus for automatic correction of beam waist position drift in real time, using wafer inspection data taken during normal tool operation. Also disclosed herein is an improved laser astigmatism corrector for use either internal or external to the laser.