The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Mar. 30, 2011
Anton Leidl, Hohenbrunn, DE;
Hans Krueger, Munich, DE;
Alois Stelzl, Munich, DE;
Wolfgang Pahl, Munich, DE;
Stefan Seitz, Windach, DE;
Anton Leidl, Hohenbrunn, DE;
Hans Krueger, Munich, DE;
Alois Stelzl, Munich, DE;
Wolfgang Pahl, Munich, DE;
Stefan Seitz, Windach, DE;
EPCOS AG, Munich, DE;
Abstract
A micro electro-mechanical systems (MEMS) package is described herein. The package includes a carrier substrate having a top side, a MEMS chip mounted on the top side of the carrier substrate, and at least one chip component on or above the top side of the carrier substrate or embedded in the carrier substrate. The package also includes a thin metallic shielding layer covering the MEMS chip and the chip component and forming a seal with the top side of the carrier substrate.