The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Feb. 04, 2010
Applicants:
Yasushi Kobayashi, Kawasaki, JP;
Kouta Yoshikawa, Kawasaki, JP;
Yoshihiro Nakata, Kawasaki, JP;
Tadahiro Imada, Kawasaki, JP;
Shirou Ozaki, Kawasaki, JP;
Inventors:
Yasushi Kobayashi, Kawasaki, JP;
Kouta Yoshikawa, Kawasaki, JP;
Yoshihiro Nakata, Kawasaki, JP;
Tadahiro Imada, Kawasaki, JP;
Shirou Ozaki, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A silicic coating of 2.4 g/cmor higher density, obtained by forming a silicic coating precursor with the use of at least one type of silane compound having a photosensitive functional group and thereafter irradiating the silicic coating precursor with at least one type of light. This silicic coating can be used as a novel barrier film or stopper film for semiconductor device.