The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Dec. 16, 2009
Vapor deposition apparatus and process for continuous deposition of a thin film layer on a substrate
Christopher Rathweg, Louisville, CO (US);
Max William Reed, Niwot, CO (US);
Mark Jeffrey Pavol, Arvada, CO (US);
Scott Daniel Feldman-peabody, Golden, CO (US);
Russell Weldon Black, Longmont, CO (US);
Christopher Rathweg, Louisville, CO (US);
Max William Reed, Niwot, CO (US);
Mark Jeffrey Pavol, Arvada, CO (US);
Scott Daniel Feldman-Peabody, Golden, CO (US);
Russell Weldon Black, Longmont, CO (US);
Primestar Solar, Inc., Arvada, CO (US);
Abstract
An apparatus and related process are provided for vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate. A receptacle is disposed within a vacuum head chamber and is configured for receipt of a source material. A heated distribution manifold is disposed below the receptacle and includes a plurality of passages defined therethrough. The receptacle is indirectly heated by the distribution manifold to a degree sufficient to sublimate source material within the receptacle. A distribution plate is disposed below the distribution manifold and at a defined distance above a horizontal plane of a substrate conveyed through the apparatus. The distribution plate includes a pattern of holes therethrough that further distribute the sublimated source material passing through the distribution manifold onto the upper surface of the underlying substrate.