The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Apr. 17, 2009
Kiyoko Yamanaka, Tachikawa, JP;
Heewon Jeong, Tokyo, JP;
Takashi Hattori, Musashimurayama, JP;
Yasushi Goto, Kokubunji, JP;
Kiyoko Yamanaka, Tachikawa, JP;
Heewon Jeong, Tokyo, JP;
Takashi Hattori, Musashimurayama, JP;
Yasushi Goto, Kokubunji, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An inertial sensor capable of making pressure of a space in which an inertial sensor such as an acceleration sensor is placed to be higher than that during a sealing step and improving reliability is provided. The inertial sensor can be achieved by means of making an inertial sensor including a substrate, a movable portion on the substrate, a cap member which seals the movable portion so as to cover the movable portion, wherein a gas-generating material is applied to the movable portion side of the cap.