The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Oct. 28, 2010
Todd C. Bailey, Poughkeepsie, NY (US);
Daniel S. Fischer, Wappingers Falls, NY (US);
Dongbing Shao, Wappingers Falls, NY (US);
Todd C. Bailey, Poughkeepsie, NY (US);
Daniel S. Fischer, Wappingers Falls, NY (US);
Dongbing Shao, Wappingers Falls, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Exemplary embodiments include a method for edge correction in pattern recognition, the method including receiving a design layout, receiving a sample plan based on the design layout, receiving user-generated edge input and generating a recipe output from the design layout, the sample plan and the user-generated edge input. The incorporation of the edge input results in SEM recipes that are much more successful in recognizing patterns that have tendency to deviate in appearance from design by, for example, moderate to severe sidewall angle.