The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Oct. 17, 2011
Applicant:
Rainer Uhl, Graefelfing, DE;
Inventor:
Rainer Uhl, Graefelfing, DE;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/36 (2006.01); G01J 3/51 (2006.01); G02B 21/36 (2006.01);
U.S. Cl.
CPC ...
Abstract
A microscope device having dual emission capability, wherein detrimental effects of image-aberrations and -distortions are reduced. By providing the means for reflecting the one beam in a manner so as to invert its handedness and the means for reflecting the second beam in a manner so as to preserve its handedness, a fully symmetrical configuration is obtained, where corresponding image points in both color/polarisation channels all experience the same field-dependent aberrations.