The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Aug. 11, 2009
Kazumasa Tanida, Kawasaki, JP;
Hideko Mukaida, Kunitachi, JP;
Susumu Harada, Yokohama, JP;
Chiaki Takubo, Sumida-ku, JP;
Kazumasa Tanida, Kawasaki, JP;
Hideko Mukaida, Kunitachi, JP;
Susumu Harada, Yokohama, JP;
Chiaki Takubo, Sumida-ku, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A semiconductor apparatus includes, a semiconductor substrate having first and second main surfaces and a through hole connecting the first and second main surfaces; a first insulation layer arranged on the first main surface, and having an opening corresponding to the through hole; a first conductive layer arranged on the first insulation layer, and covering the through hole; a second insulation layer arranged on an inner wall of the through hole and the second surface; a second conductive layer arranged in the through hole and on the second insulation layer, the second conductive layer contacting the first conductive layer; and a filling member arranged on the second conductive layer in the through hole, and having a gap between the second conductive layer on the first main surface side.