The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Dec. 30, 2011
Brad Lemon, Battle Creek, MI (US);
Joseph Hirt, Coldwater, MI (US);
Timothy Welling, Portage, MI (US);
James G. Daily, Iii, Marshall, MI (US);
David Meendering, Coldwater, MI (US);
Gary Rozak, Akron, OH (US);
Jerome O'grady, Hudson Village, OH (US);
Peter R. Jepson, Newbury, MA (US);
Prabhat Kumar, Framingham, MA (US);
Steven A. Miller, Canton, MA (US);
Richard Wu, Chelmsford, MA (US);
David G. Schwarz, Mentor, OH (US);
Brad Lemon, Battle Creek, MI (US);
Joseph Hirt, Coldwater, MI (US);
Timothy Welling, Portage, MI (US);
James G. Daily, III, Marshall, MI (US);
David Meendering, Coldwater, MI (US);
Gary Rozak, Akron, OH (US);
Jerome O'Grady, Hudson Village, OH (US);
Peter R. Jepson, Newbury, MA (US);
Prabhat Kumar, Framingham, MA (US);
Steven A. Miller, Canton, MA (US);
Richard Wu, Chelmsford, MA (US);
David G. Schwarz, Mentor, OH (US);
H.C. Starck Inc., Newton, MA (US);
Abstract
In various embodiments, tubular sputtering targets are produced by forming a tubular billet at least by pressing molybdenum powder in a mold and sintering the pressed molybdenum powder, working the tubular billet to form a worked billet, and heat treating the worked billet.