The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Apr. 11, 2008
Applicants:
Satoshi Ohya, Kawasaki, JP;
Atsushi Miyanari, Kawasaki, JP;
Inventors:
Satoshi Ohya, Kawasaki, JP;
Atsushi Miyanari, Kawasaki, JP;
Assignee:
Tokyo Ohka Kogyo Co., Ltd., Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 38/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A bonding unit () bonding a wafer () and a support plate () with a mediation of an adhesive agent () to form a bonded substance (), and a plasma treatment unit () treating the bonded substance () with a plasma treatment are provided.