The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2013
Filed:
Nov. 29, 2007
Applicants:
Jau-chyn Huang, Hsinchu, TW;
Kong-wei Cheng, Hsinchu, TW;
Wen-sheng Chang, Pingtung, TW;
Tai-chou Lee, Chiayi, TW;
Ching-chen Wu, Taichung, TW;
Inventors:
Jau-Chyn Huang, Hsinchu, TW;
Kong-Wei Cheng, Hsinchu, TW;
Wen-Sheng Chang, Pingtung, TW;
Tai-Chou Lee, Chiayi, TW;
Ching-Chen Wu, Taichung, TW;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and apparatus of growing a thin film are provided. The method comprises at least (a) providing a number of substrates; (b) cleaning the substrates; and (c) placing the substrates into a reaction liquid; (d) vibrating the reaction liquid by ultrasonic waves such that a thin film is grown on the substrates evenly.