The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2013
Filed:
May. 27, 2010
Long-sun Huang, Taipei, TW;
Yu-fu Ku, Chiayi County, TW;
Yi-kuang Yen, Kaohsiung, TW;
Shu Kuan, Keelung, TW;
Kuang-chong Wu, Taipei, TW;
Shiming Lin, Taipei, TW;
Ping-yen Lin, Taipei, TW;
Long-Sun Huang, Taipei, TW;
Yu-Fu Ku, Chiayi County, TW;
Yi-Kuang Yen, Kaohsiung, TW;
Shu Kuan, Keelung, TW;
Kuang-Chong Wu, Taipei, TW;
Shiming Lin, Taipei, TW;
Ping-Yen Lin, Taipei, TW;
National Taiwan University, Taipei, TW;
Abstract
A system for compensating a thermal effect is provided and includes a substrate structure and a microcantilever. The substrate structure includes a first piezoresistor. The first piezoresistor is buried in the substrate structure and has a first piezoresistance having a first relation to a first variable temperature. The microcantilever has the thermal effect and a second piezoresistance having a second relation to the first variable temperature, wherein the thermal effect is compensated based on the first and the second relations.