The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Mar. 27, 2008
Masaya Naoi, Minato-ku, JP;
Hitoshi Fujiyama, Minato-ku, JP;
Ichihiro Miura, Minato-ku, JP;
JSR Corporation, Tokyo, JP;
Abstract
Provided is an anisotropic conductive connector and a prove member, each of which ensures that all of the conductive parts exhibit uniform conductivity when a pressing force is applied, even when the inspection target wafer has a large area and total number of inspection target electrodes of integrated circuits is 10,000 or more, and a wafer inspection system including the probe member. The anisotropic conductive connector includes a frame plate in which a plurality of anisotropic conductive film placement holes are formed, and elastic anisotropic conductive films respectively disposed in the anisotropic conductive film placement holes in the frame plate and supported by a peripheral part of the frame plate around the corresponding anisotropic conductive film placement hole, each of the elastic anisotropic conductive films includes a plurality of connection conductive parts each extending in a thicknesswise direction of the elastic anisotropic conductive film, being disposed corresponding to a connection target electrode, and comprising an elastic polymer substance and magnetic conductive particles densely contained in the elastic polymer substance; and an insulating part that insulates the connection conductive parts to one another, and the connection conductive parts of the elastic anisotropic conductive films disposed in a peripheral area of the frame plate having a thickness smaller than that of the connection conductive parts of the elastic anisotropic conductive films disposed in a center area of the frame plate.