The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Feb. 25, 2010
Yasuzo Tanaka, Chigasaki, JP;
Junpei Yuyama, Chigasaki, JP;
Mitsuru Yahagi, Chigasaki, JP;
Hirofumi Minami, Chigasaki, JP;
Makoto Takahashi, Hidaka, JP;
Shinya Ito, Hidaka, JP;
Yasuzo Tanaka, Chigasaki, JP;
Junpei Yuyama, Chigasaki, JP;
Mitsuru Yahagi, Chigasaki, JP;
Hirofumi Minami, Chigasaki, JP;
Makoto Takahashi, Hidaka, JP;
Shinya Ito, Hidaka, JP;
Ulvac, Inc., Chigasaki-shi, JP;
Abstract
A stage apparatus enables easy position alignment at a real installation site. Mountshaving sub base platesarranged thereon are provided on carriagesand thereby constitute sub mounting tablesto; and the mountsare fixed to a main mounting tablehaving a main base plate. The positions of main base plateand sub base platesare aligned with each other by adjustment mechanismsprovided on the sub mounting tablesto. As main positioning membersand sub positioning membersare arranged on the main mounting tableand sub mounting tablesto, separation can be performed so that a state of position alignment is restorable. Accordingly, position alignment is easy when assembling after transportation.