The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2013
Filed:
Nov. 29, 2011
Applicants:
Dirk Preikszas, Oberkochen, DE;
Armin Heinz Hayn, Essex, GB;
Inventors:
Dirk Preikszas, Oberkochen, DE;
Armin Heinz Hayn, Essex, GB;
Assignees:
Carl Zeiss NTS GmbH, Oberkochen, DE;
Carl Zeiss NTS Ltd., Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/26 (2006.01); H01J 3/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A particle beam device includes a particle beam generator, an objective lens, and first and second deflection systems for deflecting the particle beam in an object plane defined by the objective lens. In a first operating mode, the first deflection system generates a first deflection field and the second deflection system generates a second deflection field. In a second operating mode, the first deflection system generates a third deflection field and the second deflection system generates a fourth deflection field.