The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2013
Filed:
Oct. 10, 2008
Applicants:
Joerg Kiesewetter, Sacka, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Stefan Kreissig, Venusberg, DE;
Inventors:
Assignee:
Cascade Microtech, Inc., Beaverton, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A probe holder has a manipulator, a probe arm arranged on the manipulator, and a probe needle that is at least indirectly connected to the probe arm. To increase the number of contacts of a substrate to be tested and to make it possible to test a plurality of contacts in etched trenches of semiconductor elements in a group of wafers, the probe arm is connected to a needle support on which the probe needle and at least one second probe needle are arranged.