The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Nov. 08, 2007
Frank Stahr, Arnsdorf, DE;
Ulf Stephan, Dresden, DE;
Olaff Steinke, Radeberg, DE;
Klaus Schade, Moritzburg, DE;
Frank Stahr, Arnsdorf, DE;
Ulf Stephan, Dresden, DE;
Olaff Steinke, Radeberg, DE;
Klaus Schade, Moritzburg, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention comprises an electrode arrangement for a coating device with a stationary first electrode () and a second movable electrode (), whose principle surfaces are opposing each other during coating, wherein the second electrode () may be moved along a plane parallel to the opposing principle surfaces, wherein at least one end face of an electrode running transversely to the principal surface an electrical shield () is provided, which extends at least partially parallel to the end face of one electrode, wherein at least one part () of the shield is formed so as to be movable.