The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
Aug. 02, 2010
George Samachisa, San Jose, CA (US);
Johann Alsmeier, San Jose, CA (US);
Andrei Mihnea, San Jose, CA (US);
George Samachisa, San Jose, CA (US);
Johann Alsmeier, San Jose, CA (US);
Andrei Mihnea, San Jose, CA (US);
SanDisk Technologies Inc., Plano, TX (US);
Abstract
A method of making a NAND string includes forming a semiconductor layer over a major surface of a substrate, patterning the semiconductor layer into an elongated nanowire shaped channel extending substantially parallel to the major surface of the substrate, forming a tunneling dielectric layer over the channel, forming a plurality of charge storage regions over the tunneling dielectric layer and undercutting the channel using the plurality of charge storage regions as mask. The channel has a narrower width than each charge storage region width, and an overhanging portion of each of the plurality of charge storage regions overhangs the channel. The method also includes forming a blocking dielectric layer over the plurality of charge storage regions, such that the blocking dielectric layer fills a space below the overhanging portion of each of the plurality of charge storage regions and forming a plurality of control gates over the blocking dielectric layer.