The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
Apr. 12, 2007
Hongqin Shi, San Jose, CA (US);
Gregory Schaadt, Santa Clara, CA (US);
James C. Dunphy, San Jose, CA (US);
Dmitri Simonian, Sunnyvale, CA (US);
John D. Porter, Oakland, CA (US);
Hongqin Shi, San Jose, CA (US);
Gregory Schaadt, Santa Clara, CA (US);
James C. Dunphy, San Jose, CA (US);
Dmitri Simonian, Sunnyvale, CA (US);
John D. Porter, Oakland, CA (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A releasing and post-releasing method for making a micromirror device and a micromirror array device are disclosed herein. The releasing method removes the sacrificial materials in the micromirror and micromirror array so as to enabling movements of the movable elements in the micromirror and micromirror array device. The post-releasing method is applied to improve the performance and quality of the released micromirrors and micromirror array devices.