The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
Jun. 18, 2010
Henricus Wilhelmus Maria Van Buel, 's-Hertogenbosch, NL;
Jeroen Thomas Broekhuijse, Overpelt, BE;
Vitaliy Prosyentsov, Deume, NL;
Sandra Van Der Graaf, 's-Hertogenbosch, NL;
Nina Vladimirovna Dziomkina, Eindhoven, NL;
Henricus Wilhelmus Maria Van Buel, 's-Hertogenbosch, NL;
Jeroen Thomas Broekhuijse, Overpelt, BE;
Vitaliy Prosyentsov, Deume, NL;
Sandra Van Der Graaf, 's-Hertogenbosch, NL;
Nina Vladimirovna Dziomkina, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A sensor for an immersion system is disclosed. The sensor comprises: a sensing device, a transparent layer and an opaque patterning layer. The sensing device is configured to sense a property of a beam of radiation. The transparent layer is configured to allow the passage of a beam of radiation therethrough. The transparent layer covers the sensing device. The opaque patterning layer is configured to impart a pattern to the beam of radiation. In the patterning layer is an opening in which is located an infilling material. The infilling material is transparent to the beam of radiation and has a similar refractive index to that of the transparent layer.