The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2013
Filed:
May. 13, 2009
Applicants:
Joseph S. Fragala, San Jose, CA (US);
Albert K. Henning, Palo Alto, CA (US);
Raymond R. Shile, Los Gatos, CA (US);
Inventors:
Joseph S. Fragala, San Jose, CA (US);
Albert K. Henning, Palo Alto, CA (US);
Raymond R. Shile, Los Gatos, CA (US);
Assignee:
NanoInk, Inc., Skokie, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01Q 70/14 (2010.01);
U.S. Cl.
CPC ...
Abstract
A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.