The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Aug. 29, 2008
Dominque Janssens, Antwerp, BE;
Luc Vanderheydt, Wilsele, BE;
Johan Degreeve, Leuven, BE;
Lieve Govaerts, Heverlee, BE;
Dominque Janssens, Antwerp, BE;
Luc Vanderheydt, Wilsele, BE;
Johan DeGreeve, Leuven, BE;
Lieve Govaerts, Heverlee, BE;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
The present invention is directed to a method for detecting anomalies in a semiconductor substrate comprising the steps of providing a semiconductor substrate, making an inspection image I of the substrate, generating an image K from image I by image processing, generating image B by binarizing image K, and examining image I using image B, characterized in that generating image K comprises multiplying a high-pass convolution filtered image G(I) from image I and a first weight image W. The present invention is also directed to an apparatus suitable for applying the method.