The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Oct. 04, 2010
Einstein Noel Abarra, Hachioji, JP;
Yasushi Miura, Kawasaki, JP;
Eiji Fujiyama, Chigasaki, JP;
Naoyuki Suzuki, Tama, JP;
Yasuyuki Taneda, Hachioji, JP;
Yasushi Kamiya, Fuchu, JP;
Einstein Noel Abarra, Hachioji, JP;
Yasushi Miura, Kawasaki, JP;
Eiji Fujiyama, Chigasaki, JP;
Naoyuki Suzuki, Tama, JP;
Yasuyuki Taneda, Hachioji, JP;
Yasushi Kamiya, Fuchu, JP;
Canon Anelva Corporation, Kawasaki-shi, JP;
Abstract
[Objection of the invention]An ion beam generator, a thermal distortion in a grid assembly is reduced. [Structure to solve the objection]Thermal expansion coefficients α, αand α, for a sidewall (A) of a discharge chamber, mounting platform () and extraction grid electrode assembly () are selected to have a relation: α>α≧α. For example, the material of discharge chamber sidewall is stainless steel o aluminum, the material of grids is Mo, W or C and the material of platform is Ti or Mo.