The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2013

Filed:

Jun. 30, 2011
Applicants:

Chanjin Park, Yongin-si, KR;

Kihyun Hwang, Seongnam-si, KR;

Dongchul Yoo, Seongnam-si, KR;

Junkyu Yang, Seoul, KR;

Gyungjin Min, Seongnam-si, KR;

Yoochul Kong, Seoul, KR;

Hanmei Choi, Seoul, KR;

Inventors:

Chanjin Park, Yongin-si, KR;

Kihyun Hwang, Seongnam-si, KR;

Dongchul Yoo, Seongnam-si, KR;

Junkyu Yang, Seoul, KR;

Gyungjin Min, Seongnam-si, KR;

Yoochul Kong, Seoul, KR;

Hanmei Choi, Seoul, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract

Provided is a three dimensional semiconductor device. The device may include mold layers vertically and sequentially stacked, a conductive pattern between the stacked mold layers, a plugging pattern vertically penetrating the stacked mold layers, an intermediate pattern between the conductive pattern and the plugging pattern, and protective layer patterns between the mold layers and the plugging pattern, wherein the protective layer patterns are separated by the intermediate pattern.


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