The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Feb. 01, 2007
Masatomo Sumiya, Ibaraki, JP;
Mikk Lippmaa, Tokyo, JP;
Tsuyoshi Ohnishi, Tokyo, JP;
Eiji Fujimoto, Ibaraki, JP;
Hideomi Koinuma, Tokyo, JP;
Masatomo Sumiya, Ibaraki, JP;
Mikk Lippmaa, Tokyo, JP;
Tsuyoshi Ohnishi, Tokyo, JP;
Eiji Fujimoto, Ibaraki, JP;
Hideomi Koinuma, Tokyo, JP;
National Institute for Materials Science, Ibaraki, JP;
Abstract
Disclosed is a device for vacuum processing that performs vapor-deposition on a substrate being heated in a vacuum chamber; the device, wherein the chamber has a light transmissible window formed in a section of the chamber; the light transmissible window and a holding part holding the substrate are connected by a linear space isolated from other parts in the chamber; a laser emitter is installed outside the light transmissible window; and the laser emitter emits a laser beam to the substrate through the linear space, thereby heating the substrate. This device enables laser heating, eliminating conventional drawbacks such as a decrease in laser output.