The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Aug. 24, 2009
Youngsoo Park, Hwaseong-si, KR;
Jungil Ahn, Suwon-si, KR;
Myeongjin Kim, Pyeongtaek-si, KR;
Sangyeob Cha, Seoul, KR;
Wangoo Hwang, Yongin-si, KR;
Youngsam an, Suwon-si, KR;
Youngsoo Park, Hwaseong-si, KR;
Jungil Ahn, Suwon-si, KR;
Myeongjin Kim, Pyeongtaek-si, KR;
Sangyeob Cha, Seoul, KR;
WanGoo Hwang, Yongin-si, KR;
Youngsam An, Suwon-si, KR;
Samsung Electronics Co., Ltd, Suwon-si, KR;
Abstract
An apparatus to form semiconductor devices includes an inner tube and an outer tube disposed to surround the inner tube. A plate is disposed at first open end of the inner tube to reduce variation between pressures at a first portion and a second portion inside the inner tube. The sum of areas of through-holes disposed on the plate is 10 to 60 percent of the entire area of the plate. The through-holes may include a first through-hole that is disposed at a central portion of the plate, and second through-holes disposed at an edge portion of the plate. The second through-holes are annularly arranged to surround the first through-hole.